AFO10000
Overview
The AFO10000 series is a model suitable for high flow and high Concentration, and can also be used for semiconductor processes such as CVD, ADL, photoresist strip, and wafer cleaning, as well as for industrial purposes such as sterilization, disinfection, and cleaning. Up to 14 cells can be installed and can be used without N2.
Technical Specs
Type
High flow High Concentration ozone generator
Performance
About 330g/Nm3
Oxygen Flow rate
5-40LPM
Feed Gas Grade
Oxygen: Grade 6 / Nitrogen: Grade 5 or better
Interface
Analog D-SUB 25pin remote control / Local control at front panel
Operation Pressure
20 – 35psig
Cooling water temperature
17℃ +,- 1 ℃
Cooling water Quality
Resistivity ≥ 50Kohm/cm with 100 micron filtration
Cooling water Flow
0.4 – 2.5 GPM(Depends on Cell Qty)
AC Power
3Ø 208V(+,- 10%), 1.5A – 21A(Depends on Cell Qty)
Frequency
50/60 Hz
Dimension
480 X 410 X 266
Compliance
CE, SEMI S2
Characteristic
N2 Free, Up to 14cells can be installed
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